Modification of flow of glass melt and elemental distributions by parallel irradiation with femtosecond laser pulses

Masaaki Sakakura; Torataro Kurita; Kouhei Yoshimura; Naoaki Fukuda; Yasuhiko Shimotsuma; Kiyotaka Miura

doi:10.1117/12.2078610

4 March 2015 Modification of flow of glass melt and elemental distributions by parallel irradiation with femtosecond laser pulses

Masaaki Sakakura, Torataro Kurita, Kouhei Yoshimura, Naoaki Fukuda, Yasuhiko Shimotsuma, Kiyotaka Miura

Author Affiliations +

Proceedings Volume 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX; 935013 (2015) https://doi.org/10.1117/12.2078610
Event: SPIE LASE, 2015, San Francisco, California, United States

Abstract

Local melting can be induced inside a glass by focusing femtosecond (fs) laser pulses at high repetition rate (>100kH). As the results, the spatial distributions of glass elements are modified in the molten region. Because various propertied of glasses depends on the composition of elements, the modification of spatial distribution of glass elements using fs laser will make it possible to control glass properties in three dimensional manner. The important point of the control of elemental distribution is how to control the flow of glass melt during laser irradiation. In this study, to elucidate how parallel laser irradiation affects the flow of glass melt during laser irradiation, we investigated the relationship between the flow of glass melt and various irradiation parameters by in-sites observation of flow of glass melt inside a sodalime glass during repetitive photoexcitation by 1 kHz and 250 kHz fs laser pulses at multiple spots.

Citation Download Citation

Masaaki Sakakura, Torataro Kurita, Kouhei Yoshimura, Naoaki Fukuda, Yasuhiko Shimotsuma, and Kiyotaka Miura "Modification of flow of glass melt and elemental distributions by parallel irradiation with femtosecond laser pulses", Proc. SPIE 9350, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX, 935013 (4 March 2015); https://doi.org/10.1117/12.2078610

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