Aberration influence on accuracy of angle measurements by means of autocollimator

Yuri V. Filatov; Roman A. Larichev

doi:10.1117/12.2184726

22 June 2015 Aberration influence on accuracy of angle measurements by means of autocollimator

Yuri V. Filatov, Roman A. Larichev

Proceedings Volume 9525, Optical Measurement Systems for Industrial Inspection IX; 95253O (2015) https://doi.org/10.1117/12.2184726
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

Autocollimator’s principle of operation is regarded from the optical imaging point of view. The aberration influence on measurements is presented through both ray geometry and wave front approaches. The role of measurement setup properties is considered. Simulation and experimental results are presented to bring preliminary estimates.

Citation Download Citation

Yuri V. Filatov and Roman A. Larichev "Aberration influence on accuracy of angle measurements by means of autocollimator", Proc. SPIE 9525, Optical Measurement Systems for Industrial Inspection IX, 95253O (22 June 2015); https://doi.org/10.1117/12.2184726

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