Moiré nanosphere lithography: use colloidal moiré patterns as masks

Kai Chen; Bharath Bangalore Rajeeva; Zilong Wu; Michael Rukavina; Thang Duy Dao; Satoshi Ishii; Masakazu Aono; Tadaaki Nagao; Yuebing Zheng

doi:10.1117/12.2187398

28 August 2015 Moiré nanosphere lithography: use colloidal moiré patterns as masks

Kai Chen, Bharath Bangalore Rajeeva, Zilong Wu, Michael Rukavina, Thang Duy Dao, Satoshi Ishii, Masakazu Aono, Tadaaki Nagao, Yuebing Zheng

Author Affiliations +

Proceedings Volume 9547, Plasmonics: Metallic Nanostructures and Their Optical Properties XIII; 95471L (2015) https://doi.org/10.1117/12.2187398
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

Nanosphere lithography (NSL) uses self-assembled layers of monodisperse micro-/nano-spheres as masks to fabricate plasmonic metal nanoparticles. Different variants of NSL have been proposed with the combination with dry etching and/or angled-deposition. These techniques have employed to fabricate a wide variety of plasmonic nanoparticles or nanostructures. Here we report another promising extension - moiré nanosphere lithography (MNSL), which incorporates in-plane twisting between neighboring monolayers, to extend the patterning capability of conventional NSL. In conventional NSL, the masks, either a monolayer or bilayer, are formed by spontaneous self-assembly. Therefore, the resulted colloidal crystal configurations are limited. In this work we used sequential stacking of polystyrene nanosphere monolayers to form a bilayer crystal at the air/water interfaces. During this layer-by-layer stacking process, a crystal domain in the top layer gains the freedom to positon itself in a relative angle to that in the bottom layer allowing for the formation of moiré patterns. Subsequent O₂ plasma etching results in a variety of complex nanostructures that have not been reported before. Using etched moiré patterns as masks, we further fabricated the corresponding gold nanostructures and characterized their scattering optical properties. We believe this facile technique provides a new strategy to fabricate novel and complex plasmonic nanostructures or metasurfaces.

Conference Presentation

Citation Download Citation

Kai Chen, Bharath Bangalore Rajeeva, Zilong Wu, Michael Rukavina, Thang Duy Dao, Satoshi Ishii, Masakazu Aono, Tadaaki Nagao, and Yuebing Zheng "Moiré nanosphere lithography: use colloidal moiré patterns as masks", Proc. SPIE 9547, Plasmonics: Metallic Nanostructures and Their Optical Properties XIII, 95471L (28 August 2015); https://doi.org/10.1117/12.2187398

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