The influence of annealing on Au films deposited on Ge seed layers

V. Janicki; J. Sancho Parramon; B. Okorn; H. Zorc

doi:10.1117/12.2186776

28 August 2015 The influence of annealing on Au films deposited on Ge seed layers

V. Janicki, J. Sancho Parramon, B. Okorn, H. Zorc

Proceedings Volume 9547, Plasmonics: Metallic Nanostructures and Their Optical Properties XIII; 95472M (2015) https://doi.org/10.1117/12.2186776
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

In this work is studied the influence of annealing on metal island and compact Au films formed on the substrates with and without Ge seed layer. Samples with different thicknesses of Au were annealed at different temperatures. Optical characterization of the samples was performed based on ellipsometric measurements. The obtained results demonstrate that, even in the conditions of moderately elevated temperature, Ge seed layer promotes the percolation of metal islands.

Citation Download Citation

V. Janicki, J. Sancho Parramon, B. Okorn, and H. Zorc "The influence of annealing on Au films deposited on Ge seed layers", Proc. SPIE 9547, Plasmonics: Metallic Nanostructures and Their Optical Properties XIII, 95472M (28 August 2015); https://doi.org/10.1117/12.2186776

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