Process control in optical fabrication

Oliver Faehnle

doi:10.1117/12.2191881

5 October 2015 Process control in optical fabrication

Oliver Faehnle

Proceedings Volume 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V; 962807 (2015) https://doi.org/10.1117/12.2191881
Event: SPIE Optical Systems Design, 2015, Jena, Germany

Abstract

Predictable and stable fabrication processes are essential for reliable cost and quality management in optical fabrication technology. This paper reports on strategies to generate and control optimum sets of process parameters for e.g. sub-aperture polishing of small optics (featuring clear apertures smaller than 2 mm). Emphasis is placed to distinguish between machine and process optimization demonstrating, that e.g. it is possible setting up ductile mode grinding process by other means than controlling critical depth of cut. Finally, a recently developed in situ testing technique is applied to monitor surface quality on-machine while abrasively working the surface under test enabling an on-line optimization of polishing processes eventually minimizing polishing time and fabrication cost.

Citation Download Citation

Oliver Faehnle "Process control in optical fabrication", Proc. SPIE 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V, 962807 (5 October 2015); https://doi.org/10.1117/12.2191881

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