Comparison of various colloidal silica slurries and process parameters for fused silica finishing

S. Campaignolle; C. Maunier; J. Neauport

doi:10.1117/12.2195724

11 October 2015 Comparison of various colloidal silica slurries and process parameters for fused silica finishing

S. Campaignolle, C. Maunier, J. Neauport

Proceedings Volume 9633, Optifab 2015; 963308 (2015) https://doi.org/10.1117/12.2195724
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

We have selected three colloidal silica slurries and compared their ability for fused silica finishing, by varying the load and slurry concentration. We found that the process parameters can affect differently the finishing efficiency, roughness and surface defects density, depending on the slurry considered.

Citation Download Citation

S. Campaignolle, C. Maunier, and J. Neauport "Comparison of various colloidal silica slurries and process parameters for fused silica finishing", Proc. SPIE 9633, Optifab 2015, 963308 (11 October 2015); https://doi.org/10.1117/12.2195724

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