Rapid online measurement method for radius of curvature of fine grinding optics based on tool setting system

Lei Dai; Jian Zhang; Yongqiang Gu; Erlong Miao

doi:10.1117/12.2245876

28 October 2016 Rapid online measurement method for radius of curvature of fine grinding optics based on tool setting system

Lei Dai, Jian Zhang, Yongqiang Gu, Erlong Miao

Author Affiliations +

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96830V (2016) https://doi.org/10.1117/12.2245876
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The radius of curvature (ROC) is one of the most important parameters of sphere optic components. In optic fine grinding process, radius of curvature accuracy requires up to 0.1%. We propose a method based on high precision CNC grinding machine, develop ROC online measurement method for fine grinding optics. This rapid method only takes few measurement points based on spiral route path, attaining enough accuracy and reduce the time cost, furthermore, can greatly reduce the repeated installation error. Analyzing the uncertainty sources that affect to the ROC measurement results, calculates the combined standard uncertainty 32.8 micron. Completed comparison experiments with CMM, the standard deviation of the experiment result are about 18 micron that approaches to CMM results.

Citation Download Citation

Lei Dai, Jian Zhang, Yongqiang Gu, and Erlong Miao "Rapid online measurement method for radius of curvature of fine grinding optics based on tool setting system", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830V (28 October 2016); https://doi.org/10.1117/12.2245876

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