Effect of polishing induced subsurface damages on laser induced damage in fused silica optics

Xiang He; Heng Zhao; Ying Huang; Chao Cai; JiangChuan Hu; Ping Ma

doi:10.1117/12.2244005

28 October 2016 Effect of polishing induced subsurface damages on laser induced damage in fused silica optics

Xiang He, Heng Zhao, Ying Huang, Chao Cai, JiangChuan Hu, Ping Ma

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 968326 (2016) https://doi.org/10.1117/12.2244005
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Conventional used ceria polishing would induce both of Ce contaminants and subsurface damages, which mainly restricts the laser induced damage resistance of fused silica optics. To control the near surface defects, nanometer sized colloidal silica are used to polish fused silica optics after the normal ceria polishing process. Then the contaminant elements and subsurface damages of the polished samples were analyzed by secondary ion mass spectrometry and Nomarski microscopy. It reveals that ceria polishing would introduce lots of subsurface damages whereas colloidal silica polishing induces much fewer subsurface damages especially no fracture induced severe subsurface damages. The laser damage tests reveal that subsequent colloidal silica polishing of the ceria pre-polished samples could gradually eliminate the ceria polishing induced subsurface damages and lower the laser induced damage density accordingly with the increased polishing time. But unlike the damage density, only the severe subsurface damages are totally eliminated could the damage threshold be substantially improved. These results incline to indicate that the subsurface damages have great influence on the laser induced damage density and the fracture related severe subsurface damages will greatly restrict the damage threshold in polished optics.

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Xiang He, Heng Zhao, Ying Huang, Chao Cai, JiangChuan Hu, and Ping Ma "Effect of polishing induced subsurface damages on laser induced damage in fused silica optics", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968326 (28 October 2016); https://doi.org/10.1117/12.2244005

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KEYWORDS

Polishing

Silica

Laser induced damage

Laser damage threshold

Cerium

HF etching

Particles

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