Direct optical patterning of poly(dimethylsiloxane) microstructures for microfluidic chips

Shaorui Gao; Wing-Tai Tung; Dexter Siu-Hong Wong; Liming Bian; A. Ping Zhang

doi:10.1117/12.2243464

25 October 2016 Direct optical patterning of poly(dimethylsiloxane) microstructures for microfluidic chips

Shaorui Gao, Wing-Tai Tung, Dexter Siu-Hong Wong, Liming Bian, A. Ping Zhang

Proceedings Volume 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials; 96850X (2016) https://doi.org/10.1117/12.2243464
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In this paper, we present an optical maskless exposure approach for direct patterning of large-area high resolution microfluidic chips using photosensitive poly(dimethylsiloxane) (PDMS) materials. Both positive- and negative-tone photosensitive PDMS (photoPDMS) were successfully patterned into various microfluidic devices with complex geometries by using an optical maskless lithography process. The positive-tone PDMS is used for patterning of largearea chips, while the negative-tone PDMS is demonstrated to fabricate high-resolution microstructures and on-chip devices. With the seamless pattern-stitching technique, a large-area microfluidic chip with size of 5.5 × 2.8 cm² with complex three-dimensional (3D) staggered herringbone mixers (SHMs) for micro-flow gradient generation has been directly fabricated within 125 minutes by using the positive-tone PDMS. A small microfluidic chip with feature size as small as 5 μm is demonstrated by using the negative-tone PDMS. The experimental results reveal that the optical maskless lithography technology enables to rapidly pattern high-resolution microstructures and is very promising for development of lab-on-a-chip devices.

Citation Download Citation

Shaorui Gao, Wing-Tai Tung, Dexter Siu-Hong Wong, Liming Bian, and A. Ping Zhang "Direct optical patterning of poly(dimethylsiloxane) microstructures for microfluidic chips", Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 96850X (25 October 2016); https://doi.org/10.1117/12.2243464

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KEYWORDS

Microfluidics

Optical lithography

3D modeling

Structural health monitoring

3D image processing

Maskless lithography

Ultraviolet radiation

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