Improvement of reconstructed phase distribution of fast moving phase object in digital holographic microscope

Peng Xia; Naoya Nagahama; Xiangyu Quan; Kouichi Nitta; Osamu Matoba; Yasuhiro Awatsuji

doi:10.1117/12.2216745

8 June 2016 Improvement of reconstructed phase distribution of fast moving phase object in digital holographic microscope

Peng Xia, Naoya Nagahama, Xiangyu Quan, Kouichi Nitta, Osamu Matoba, Yasuhiro Awatsuji

Author Affiliations +

Proceedings Volume 9718, Quantitative Phase Imaging II; 97181R (2016) https://doi.org/10.1117/12.2216745
Event: SPIE BiOS, 2016, San Francisco, California, United States

Abstract

For defect detection or undesired object in commercial products, it is required to develop a fast measurement system that can obtain three-dimensional distribution of surface of the opaque medium such as metal or inside of the transparent medium. For this purpose, we fabricated a digital holographic microscope using a fast image sensor when the phase object is put on a fast movable stage. In the fabricated system, an image sensor operated at maximum frame rate of 2000 fps and a movable stage operated at maximum speed of 300 mm/s are introduced. Under the continuous wave illumination, motion-blurred phase object is reconstructed. By using numerical processing such as deconvolution filter, the reconstructed phase distribution is much improved. Numerical results are presented.

Citation Download Citation

Peng Xia, Naoya Nagahama, Xiangyu Quan, Kouichi Nitta, Osamu Matoba, and Yasuhiro Awatsuji "Improvement of reconstructed phase distribution of fast moving phase object in digital holographic microscope", Proc. SPIE 9718, Quantitative Phase Imaging II, 97181R (8 June 2016); https://doi.org/10.1117/12.2216745

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