Analysis of process parameter for the ablation of optical glasses with femto- and picosecond laser pulses

Christian Schindler; Maria Friedrich; Jens Bliedtner

doi:10.1117/12.2212826

4 March 2016 Analysis of process parameter for the ablation of optical glasses with femto- and picosecond laser pulses

Christian Schindler, Maria Friedrich, Jens Bliedtner

Proceedings Volume 9736, Laser-based Micro- and Nanoprocessing X; 973619 (2016) https://doi.org/10.1117/12.2212826
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

Experiments with an ultrashort pulsed laser system emitting pulses ranging from 350 fs to 10 ps and a maximum average power of 50 W at 1030 nm are presented. The laser beam gets deflected by a galvanometric scan-system with maximum scan speed of 2500 mm/s and focused by F-theta lenses onto the substrates. By experiments the influences of pulse energy, fluence, laser wavelength, pulse length and material conditions on the target figures is analyzed. These are represented by the material characteristics mean squared roughness, ablation depths as well as the microcrack distribution in depth. The experimental procedure is applied onto a series of fused silica and SF6 samples.

Citation Download Citation

Christian Schindler, Maria Friedrich, and Jens Bliedtner "Analysis of process parameter for the ablation of optical glasses with femto- and picosecond laser pulses", Proc. SPIE 9736, Laser-based Micro- and Nanoprocessing X, 973619 (4 March 2016); https://doi.org/10.1117/12.2212826

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available