Development of a long trace profiler at SPring-8 using a newly developed slope sensor

Y. Senba; H. Kishimoto; T. Miura; H. Ohashi

doi:10.1117/12.2239394

8 September 2016 Development of a long trace profiler at SPring-8 using a newly developed slope sensor

Y. Senba, H. Kishimoto, T. Miura, H. Ohashi

Proceedings Volume 9962, Advances in Metrology for X-Ray and EUV Optics VI; 996204 (2016) https://doi.org/10.1117/12.2239394
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

The long trace profiler (LTP) at SPring-8 has been upgraded using a newly developed laser-based slope sensor for precise measurements with high spatial resolution. Simulations of centroid calculation in the slope sensor have been performed to evaluate the ultimate accuracy of slope measurement. A performance test of the LTP has also been performed, and a spatial resolution of 0.6 mm has been confirmed.

Conference Presentation

Citation Download Citation

Y. Senba, H. Kishimoto, T. Miura, and H. Ohashi "Development of a long trace profiler at SPring-8 using a newly developed slope sensor", Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996204 (8 September 2016); https://doi.org/10.1117/12.2239394

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