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2 November 2016 Development of metrology for one-meter-long mirrors (Conference Presentation)
Shinya Aono, Hiroki Nakamori, Akihiko Ueda, Takashi Tsumra, Hiromi Okada
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Proceedings Volume 9962, Advances in Metrology for X-Ray and EUV Optics VI; 996209 (2016) https://doi.org/10.1117/12.2239396
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States
Abstract
We fabricate ultra-precision mirrors, Osaka Mirror, for synchrotron facilities. In order to fabricate them, it is very important to measure mirror surface precisely. In respect of the importance, we use two kinds of metrology, RADSI and MSI, developed by Osaka University. We have delivered more than 300 mirrors to synchrotron facilities all over the world since 2006 and our mirrors have produced excellent results to many researchers. As the demand on one meter long mirrors has increased lately, we developed RADSI and MSI systems which are capable in precise measurement of such long mirrors.
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Shinya Aono, Hiroki Nakamori, Akihiko Ueda, Takashi Tsumra, and Hiromi Okada "Development of metrology for one-meter-long mirrors (Conference Presentation)", Proc. SPIE 9962, Advances in Metrology for X-Ray and EUV Optics VI, 996209 (2 November 2016); https://doi.org/10.1117/12.2239396
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KEYWORDS
Mirrors
Metrology
Multispectral imaging
Synchrotrons
Current controlled current source
EUV optics
X-ray optics
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