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Ultrafast laser processing of glass material was investigated to address the need for precise, flexible figuring and finishing tools with minimal thermal effects. A dynamic pulse propagation model was established and used to predict the spatial and temporal distribution of surface temperature, through which a set of optimum laser processing conditions was determined. The impact of laser parameters on material removal and surface quality was experimentally investigated for Borofloat glass. Linearly controllable material removal is achieved with the determined laser parameters, and the processed area maintains the optic-quality surface roughness for various material removal depths.
This research was supported by the US National Science Foundation I/UCRC Center for Freeform Optics (IIP-1822049 and IIP-1822026).
Gong Chen andJie Qiao
"Precision Figuring and Finishing of Glass Using Femtosecond Lasers", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080N (17 March 2023); https://doi.org/10.1117/12.2650871
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Gong Chen, Jie Qiao, "Precision Figuring and Finishing of Glass Using Femtosecond Lasers," Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080N (17 March 2023); https://doi.org/10.1117/12.2650871