Realization of subsampling schemes for compressive nano-FTIR imaging

Dario Siebenkotten; Manuel Marschall; Gerd Wübbeler; Arne Hoehl; Eckart Rühl; Clemens Elster; Bernd Kästner

doi:10.1117/12.2672558

23 August 2023 Realization of subsampling schemes for compressive nano-FTIR imaging

Dario Siebenkotten, Manuel Marschall, Gerd Wübbeler, Arne Hoehl, Eckart Rühl, Clemens Elster, Bernd Kästner

Proceedings Volume PC12619, Modeling Aspects in Optical Metrology IX; PC1261902 (2023) https://doi.org/10.1117/12.2672558
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

Nanoscale IR imaging is an emerging tool for the characterization of micro- and nanostructures. However, their quantitative characterization requires hyperspectral imaging, where at each point in space a complete spectrum is recorded. As hyperspectral nano-IR imaging is based on the combination of the optical near-field with an AFM, it is inherently recorded serially. This severely limits its applicability due to the long acquisition times involved and accompanied stability issues. In addition, industrial applications are limited due to these issues. In this work we implement a subsampling strategy [1] using a commercial nano-FTIR system to significantly reduce the measurement time in hyperspectral imaging measurements by compressing the measurements combined with a low-rank matrix reconstruction. We apply this scheme to materials from the field of power electronics, where the ongoing development of wide-bandgap compound semiconductors is limited by material defects which IR imaging is sensitive to. [1] Metzner, S., Kästner, B., Marschall, M., Wübbeler, G., Wundrack, S., Bakin, A., Hoehl, A., Rühl, E., & Elster, C. (2022). Assessment of Subsampling Schemes for Compressive Nano-FTIR Imaging. IEEE Transactions on Instrumentation and Measurement, 71, 1–8. https://doi.org/10.1109/TIM.2022.3204072

Conference Presentation

Citation Download Citation

Dario Siebenkotten, Manuel Marschall, Gerd Wübbeler, Arne Hoehl, Eckart Rühl, Clemens Elster, and Bernd Kästner "Realization of subsampling schemes for compressive nano-FTIR imaging", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC1261902 (23 August 2023); https://doi.org/10.1117/12.2672558

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