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Micro- and nanopatterning of metal oxide materials is an important process to develop electronic or optoelectronic devices. ZnO is a material of choice for its semiconducting and photoluminescence properties. We have developed and investigated a new process that relies on direct write laser patterning in the DUV range to prepare photoluminescent microstructures of ZnO at room temperature, under air. This process is based on a synthesis of colloidal ZnO nanocrystals (NCs) with a careful choice of the ligands on the surface to obtain an optimal (i) stability of the colloids, (ii) redissolution of the non-insolated parts and (iii) cross-linking of the DUV-insolated parts. The mechanisms of photocrosslinking are studied by different spectroscopic methods. This room temperature process preserves the photoluminescence properties of the NCs and the wavelength used in DUV allows to reach a sub-micrometer resolution, which opens new perspectives for the integration of microstructures on flexible substrates for opto-electronic applications. We also show that this concept can be extended to other metal oxide nanoparticles.
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Quentin Kirscher, Fabien Grasset, Dominique Berling, Olivier Soppera, "Laser direct writing photoluminescent patterns from ZnO nanocrystals," Proc. SPIE PC12652, UV and Higher Energy Photonics: From Materials to Applications 2023, PC1265204 (5 October 2023); https://doi.org/10.1117/12.2682841