CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12695 > Article
Presentation
4 October 2023 Fabrication and LTP test result for a 460 mm long deformable mirror to reduce “junction effect”
Yoshio Ichii, Takato Inoue, Fumiharu Tramae, Shinsaku Shiroma, Shinya Aono, Xianbo Shi, Jun Qian, Luca Rebuffi, Juniki Sonoyama, Hisataka Takenaka, Satoshi Matsuyama, Lahsen Assoufid, Kazuto Yamauchi
Author Affiliations +
Proceedings Volume PC12695, Advances in Metrology for X-Ray and EUV Optics X; PC1269501 (2023) https://doi.org/10.1117/12.2680882
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States
Abstract
In this study, we manufactured a 460 mm long deformable mirror which has 28 channel-PZTs on the ellipse pre-figured mirror and flat back surfaces. We evaluated the LTP target ellipse shape measurement result and the "junction" effect by applying voltage to each electrode.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Yoshio Ichii, Takato Inoue, Fumiharu Tramae, Shinsaku Shiroma, Shinya Aono, Xianbo Shi, Jun Qian, Luca Rebuffi, Juniki Sonoyama, Hisataka Takenaka, Satoshi Matsuyama, Lahsen Assoufid, and Kazuto Yamauchi "Fabrication and LTP test result for a 460 mm long deformable mirror to reduce “junction effect”", Proc. SPIE PC12695, Advances in Metrology for X-Ray and EUV Optics X, PC1269501 (4 October 2023); https://doi.org/10.1117/12.2680882
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Deformable mirrors
Fabrication
Ferroelectric materials
Manufacturing
Mirror surfaces
Nanoparticles
Physics
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top