Dielectrics cutting with Bessel beam in femtosecond GHz-burst regime

Pierre Balage; Théo Guilberteau; Manon Lafargue; Guillaume Bonamis; Clemens Hönninger; John Lopez; Inka B. Manek-Hönninger

doi:10.1117/12.3001594

13 March 2024 Dielectrics cutting with Bessel beam in femtosecond GHz-burst regime

Pierre Balage, Théo Guilberteau, Manon Lafargue, Guillaume Bonamis, Clemens Hönninger, John Lopez, Inka B. Manek-Hönninger

Author Affiliations +

Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC1287203 (2024) https://doi.org/10.1117/12.3001594
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

Femtosecond laser processing in GHz-burst mode has attracted much attention. Here, we report on dielectrics cutting with a spatially and temporally shaped femtosecond laser beam using a Bessel beam in the GHz-burst regime. In this contribution, we report on the influence of the number of pulses per burst as well as the pulse duration of the individual pulses within the burst. The resulting surface roughness of the cutting planes is measured as a function of the cutting parameters to evaluate the cutting quality.

Conference Presentation

Citation Download Citation

Pierre Balage, Théo Guilberteau, Manon Lafargue, Guillaume Bonamis, Clemens Hönninger, John Lopez, and Inka B. Manek-Hönninger "Dielectrics cutting with Bessel beam in femtosecond GHz-burst regime", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC1287203 (13 March 2024); https://doi.org/10.1117/12.3001594

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