Accurate characterization of diffractive waveguide gratings

Murat Deveci; Thomas Kerst; Roosa Mäkitalo; Janne Simonen; Pekka Laiho

doi:10.1117/12.3001310

13 March 2024 Accurate characterization of diffractive waveguide gratings

Murat Deveci, Thomas Kerst, Roosa Mäkitalo, Janne Simonen, Pekka Laiho

Proceedings Volume PC12913, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V; PC129130N (2024) https://doi.org/10.1117/12.3001310
Event: SPIE AR | VR | MR, 2024, San Francisco, California, United States

Conference Poster

Abstract

Defects in master and replica waveguide gratings can cause image quality issues on AR displays. Characterizing these gratings is difficult due to their small features, which can be smaller than the wavelength of visible light. Microscopy is unsuitable for production testing as it lacks resolution and can be destructive. The authors propose an optical metrology setup using Littrow configuration to accurately measure diffraction grating pitch and orientation at a picometer and arcsecond scale to identify defects. The authors will also demonstrate the impact of grating analysis on the image quality of diffractive waveguides.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Murat Deveci, Thomas Kerst, Roosa Mäkitalo, Janne Simonen, and Pekka Laiho "Accurate characterization of diffractive waveguide gratings", Proc. SPIE PC12913, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) V, PC129130N (13 March 2024); https://doi.org/10.1117/12.3001310

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