Plasma enhanced co oxidation in EUV drive lasers

Andrew C. Herschberg; Nathan Bartlett; Gordon Jameson Crouse; David N Ruzic

doi:10.1117/12.3013052

10 April 2024 Plasma enhanced co oxidation in EUV drive lasers

Andrew C. Herschberg, Nathan Bartlett, Gordon Jameson Crouse, David N Ruzic

Proceedings Volume PC12953, Optical and EUV Nanolithography XXXVII; PC1295311 (2024) https://doi.org/10.1117/12.3013052
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Conference Poster

Abstract

During operation of CO₂ drive lasers up to 60% of the CO₂ decomposes into CO. Gold can be used as a catalyst to reduce this decomposition to around 40%. CO₂ decomposition has a significant impact on laser efficiency and EUV production. Moreover, free O radicals create parasitic species such as Ox and NOx compounds. It is hypothesized that a secondary plasma source near the catalyst will increase O concentration near the catalytic surface, increasing the rate of CO oxidation. Species concentrations are measured using OES as a function of plasma power, gas mixture, and gas flow speed. The effect of an auxiliary surface wave plasma source is reported for tests with a heterogeneous gold catalyst installed.

Citation Download Citation

Andrew C. Herschberg, Nathan Bartlett, Gordon Jameson Crouse, and David N Ruzic "Plasma enhanced co oxidation in EUV drive lasers", Proc. SPIE PC12953, Optical and EUV Nanolithography XXXVII, PC1295311 (10 April 2024); https://doi.org/10.1117/12.3013052

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