Open Access
10 February 2022 Laboratory-based reflectometer using line spectra of an RF-induced gas-discharge lamp in 30- to 200-nm wavelength range
Yue Yu, Zeyi Ye, Li Jiang, Qianxia Yao, Shuangying Li, Jiali Wu, Jinlong Zhang, Qiushi Huang, Chun Xie, Andrey A. Sokolov, Hongjun Zhou, Tonglin Huo, Wenbin Li, Zhanshan Wang
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Abstract

A laboratory-based reflectometer designed for characterizing the reflectivity of optical coatings in 30- to 200-nm wavelength range was recently developed at IPOE. An RF-produced gas-discharge light source is applied to generate characteristic lines. The light source is mounted on a grazing incident monochromator with a 146-deg deviation angle between the incident and diffracted arms. By precisely adjusting the toroidal grating inside the monochromator chamber, monochromatic lights are acquired through the exit slit. A collimator mirror and two sets of collimation slits with 2  mm  ×  2  mm dimension are utilized for reducing the divergence of the beam incident on the sample. A high-precision six-axis translation stage, which allows a heavy sample with a maximum diameter of 100 mm, is used to control positions of the samples and the detector. A chopper disk used both for incident light intensity monitor and signal modulation is placed with an incidence angle of 70 deg relative to the incident light beam. The configuration, adjustment process, and test results of the reflectometer are presented in detail. The experimental reflectivity results for Al  /  LiF  /  MgF2 film obtained from our laboratory and BESSY-II Synchrotron as well as Hefei Synchrotron Light Source are given and compared for demonstrating the reliability of the system.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Yue Yu, Zeyi Ye, Li Jiang, Qianxia Yao, Shuangying Li, Jiali Wu, Jinlong Zhang, Qiushi Huang, Chun Xie, Andrey A. Sokolov, Hongjun Zhou, Tonglin Huo, Wenbin Li, and Zhanshan Wang "Laboratory-based reflectometer using line spectra of an RF-induced gas-discharge lamp in 30- to 200-nm wavelength range," Journal of Astronomical Telescopes, Instruments, and Systems 8(1), 017002 (10 February 2022). https://doi.org/10.1117/1.JATIS.8.1.017002
Received: 2 November 2021; Accepted: 14 January 2022; Published: 10 February 2022
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Reflectometry

Reflectivity

Light sources

Lamps

Mirrors

Monochromators

Sensors

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