Micromachined optically transparent, flexible pressure sensor array exhibiting ultrahigh sensitivity

John Yan

doi:10.1117/1.JMM.11.1.013005

23 February 2012 Micromachined optically transparent, flexible pressure sensor array exhibiting ultrahigh sensitivity

John Yan

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 1, 013005 (February 2012). https://doi.org/10.1117/1.JMM.11.1.013005

Abstract

Development of an array of ultrasensitive capacitive pressure sensors which is both optically transparent in the visible range and flexible would represent a significant advance over current sensor capabilities. To construct these micromachined pressure sensors, the efficacy of oxygen plasma to bond the microfluidic network constructed out of polydimethlysiloxane and various plastic substrates has been examined. These pressure sensing elements can find potential applications in lab-on-a-chip environments, biosensors and photonic switching. The design, modeling, fabrication and measurement results are presented.

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John Yan "Micromachined optically transparent, flexible pressure sensor array exhibiting ultrahigh sensitivity," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 013005 (23 February 2012). https://doi.org/10.1117/1.JMM.11.1.013005

Published: 23 February 2012

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