Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure

I-Yu Huang; Chang-Yu Lin; Je-Wei Lan

doi:10.1117/1.JMM.12.1.013019

28 March 2013 Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure

I-Yu Huang, Chang-Yu Lin, Je-Wei Lan

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 1, 013019 (March 2013). https://doi.org/10.1117/1.JMM.12.1.013019

Abstract

A novel silicon groove reflective grating structure (RGS) to reduce effectively the insertion loss of a high C-axis (002) thin-film zinc oxide (ZnO) surface acoustic wave (SAW) device is proposed. The insertion loss (S₂₁ parameter) of three types of SAW devices was investigated and compared; one type had no RGS design, and the other two types had either a conventional metal electrode RGS or a novel etched silicon groove RGS. The wave propagation modes, the harmonic response, and the displacement amplitude profile of the proposed SAW devices were simulated by finite element analysis software (ANSYS). The implemented basic SAW device consists of a sputter-deposited high-quality ZnO thin film on the surface of a Si/SiO ₂ /Si ₃N₄/Cr/Au substrate. The insertion loss of the proposed SAW device with silicon groove RGS can be reduced to −19.49 dB , which is much smaller than the insertion losses of the SAW devices with a metal electrode-type RGS (−33.15 dB ) and without an RGS (−47.9 dB ). The resonant frequencies of the SAW devices studied (47.37 to 48.05 MHz) are in close agreement with the simulated results (46.8 to 47.55 MHz).

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I-Yu Huang, Chang-Yu Lin, and Je-Wei Lan "Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013019 (28 March 2013). https://doi.org/10.1117/1.JMM.12.1.013019

Published: 28 March 2013

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