Experiments and results of the silicon micromachined gyroscope

Fu-Xue Zhang; Qing-Wen Yan; Wei Zhang

doi:10.1117/1.3122366

1 April 2009 Experiments and results of the silicon micromachined gyroscope

Fu-Xue Zhang, Qing-Wen Yan, Wei Zhang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 2, 021130 (April 2009). https://doi.org/10.1117/1.3122366

Abstract

We report a multifunctional silicon micromachined gyroscope. The gyroscope can sense the rolling, yawing, and pitching angular velocity synchronously. Both the principle and the experiment of the gyroscope are presented to explain the multifunction. We also discuss the way to determine the deflecting direction and deflecting position of the rotating carrier in the gravitation field.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Fu-Xue Zhang, Qing-Wen Yan, and Wei Zhang "Experiments and results of the silicon micromachined gyroscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 021130 (1 April 2009). https://doi.org/10.1117/1.3122366

Published: 1 April 2009

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