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28 December 2023 Special Section Guest Editorial: Plasma Modeling and Feature Profile Simulation
Catherine B. Labelle, Mark J. Kushner
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Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 22, Issue 4, 041501 (December 2023). https://doi.org/10.1117/1.JMM.22.4.041501
Abstract

Guest Editors Catherine B. Labelle and Mark J. Kushner introduce the Special Section on Plasma Modeling and Feature Profile Simulation.
© 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
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Catherine B. Labelle and Mark J. Kushner "Special Section Guest Editorial: Plasma Modeling and Feature Profile Simulation," Journal of Micro/Nanopatterning, Materials, and Metrology 22(4), 041501 (28 December 2023). https://doi.org/10.1117/1.JMM.22.4.041501
Published: 28 December 2023
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KEYWORDS
Plasma
Modeling
Computer simulations
Microelectronics
Process modeling
Systems modeling
Design
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