Direct, parallel nanopatterning of silicon carbide by laser nanosphere lithography

Arvind Battula; Senthil Prakash Theppakuttai; Shaochen Chen

doi:10.1117/1.2177288

1 January 2006 Direct, parallel nanopatterning of silicon carbide by laser nanosphere lithography

Arvind Battula, Senthil Prakash Theppakuttai, Shaochen Chen

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 1, 011009 (January 2006). https://doi.org/10.1117/1.2177288

Abstract

A technique to create nanopatterns on hard-to-machine bulk silicon carbide (SiC) with a laser beam is presented. A monolayer of silica (SiO₂) spheres of 1.76-µm and 640-nm diameter are deposited on the SiC substrate and then irradiated with an Nd:YAG laser of 355 and 532 nm. The principle of optical near-field enhancement between the spheres and substrate when irradiated by a laser beam is used for obtaining the nanofeatures. The features are then characterized using a scanning electron microscope and an atomic force microscope. The diameter of the features thus obtained is around 150 to 450 nm and the depths vary from 70 to 220 nm.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Arvind Battula, Senthil Prakash Theppakuttai, and Shaochen Chen "Direct, parallel nanopatterning of silicon carbide by laser nanosphere lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 011009 (1 January 2006). https://doi.org/10.1117/1.2177288

Published: 1 January 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE