Mr. Sébastien Marbach Profile

Sébastien Marbach

at ICube - Univ of Strasbourg

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 16 August 2023 Presentation

Multimodal local spectral/topographic characterization of laser-induced colored stainless steel with coherence scanning interferometry

Paul Montgomery, Sébastien Marbach, Rémy Claveau, Florie Ogor, Christophe Cordier, Jesse Schiffler, Manuel Flury

Proceedings Volume 12618, 126180O (2023) https://doi.org/10.1117/12.2673958

KEYWORDS: Laser interferometry, Stainless steel, Physical coherence, Oxides, Surface roughness, Spectroscopy, Spectral response, Reflectance spectroscopy, Nanosecond lasers, Metals

Read Abstract +

Proceedings Article | 20 June 2021 Presentation

Local spectroscopic characterization of materials using coherence scanning interferometry

Paul Montgomery, Sébastien Marbach, Rémy Claveau, Manuel Flury

Proceedings Volume 11782, 117820S (2021) https://doi.org/10.1117/12.2593011

KEYWORDS: Spectroscopy, Interferometry, Reflectivity, Spectrometers, Calibration, Refractive index, Near field scanning optical microscopy, Near field optics, Microscopy, Microscopes

Read Abstract +

The large spot size of a few mm2 with spectrometers and a few thousand µm2 with ellipsometers means that classical spectroscopic characterization is limited to that of bulk materials. In the development of more recent heterogeneous materials in which there exists local variations between materials on a microscopic scale, a much smaller spot size is required for optical characterization. Several new techniques have been developed for performing local spectroscopy, such as by color camera microscopy, hyperspectral imaging microscopy, scattering type scanning near field optical microscopy (s-SNOM) or spectroscopic optical coherence tomography (s-OCT). Concerning the latter, the related technique of coherence scanning interferometry (CSI) also allows local spectroscopy by applying Fourier Transform processing to the local polychromatic interference fringe signal. This technique offers the advantages of not requiring an external spectrometer since an interferometer is incorporated in the microscope objective, but challenges remain in order to correctly adjust and calibrate the system. In this paper we present some of our latest results of using CSI to accurately measure the local spectra at a microscopic scale with a spot size a little larger than that defined by the diffraction limit, of around 1 µm. Results demonstrate measurements of local reflectance spectra at the surface of a heterogeneous sample and on small structures buried within or under a transparent layer. Other theory has been developed to allow the measurement of local transparent layer thickness and refractive index. As well as performing local point measurements, we show how with a single scan over the optical axis, 2D cartographic maps can be made of reflectance spectra together with the topographic height map of the same area. Any nanometric height errors present due to phase on reflection errors linked to the presence of complex refractive indices can then be corrected using the spectroscopic information.

Proceedings Article | 1 April 2020 Presentation + Paper

White light interference microscopy system design

Sébastien Marbach, Christophe Cordier, Rémy Claveau, Thierry Engel, Paul Montgomery, Manuel Flury

Proceedings Volume 11352, 113521B (2020) https://doi.org/10.1117/12.2555929

KEYWORDS: 3D imaging metrology, Phase interferometry, Mirau interferometers, Optical instrument design, Optical resolution, Interferometry, Interferometers, Objectives, Signal to noise ratio, Imaging systems, Signal processing, Microscopy, Cameras, 3D metrology, Microscopes

Read Abstract +

Proceedings Article | 21 June 2019 Paper

Microsphere-assisted imaging of sub-diffraction-limited features

Sébastien Marbach, Stephane Perrin, Paul Montgomery, Manuel Flury, Sylvain Lecler

Proceedings Volume 11056, 110560R (2019) https://doi.org/10.1117/12.2526086

KEYWORDS: Microscopes, Microscopy, Super resolution, Imaging systems, 3D metrology, Optical microscopes, Image resolution, 3D image processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years