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16 March 2023 Investigation of plasmonic losses in TCOs based on heavily doped ZnO (Conference Presentation)
Vitaliy S. Avrutin, Dhruv Fomra, Nathaniel Kinsey, Natalia Izyumskaya, Ümit Özgür, Hadis Morkoç, Martin Feneberg, Ruediger Goldhahn
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Proceedings Volume PC12422, Oxide-based Materials and Devices XIV; PC1242211 (2023) https://doi.org/10.1117/12.2661314
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Due to relatively low losses, transparent conducting oxides (TCOs) attracted a great deal of attention as a viable alternative to metals for a variety of plasmonic applications targeting the near-infrared (NIR) spectral range. However, additional losses can be caused by the presence of defects caused by the nonequilibrium nature of methods used for depositing TCO thin films. To understand the origin of the additional loss in the ZnO-based TCOs, we have investigated ZnO thin films heavily doped with Al and Ga that were grown by atomic layer deposition and molecular beam epitaxy using spectroscopic ellipsometry, Raman spectrometry, and x-ray diffraction.
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Vitaliy S. Avrutin, Dhruv Fomra, Nathaniel Kinsey, Natalia Izyumskaya, Ümit Özgür, Hadis Morkoç, Martin Feneberg, and Ruediger Goldhahn "Investigation of plasmonic losses in TCOs based on heavily doped ZnO (Conference Presentation)", Proc. SPIE PC12422, Oxide-based Materials and Devices XIV, PC1242211 (16 March 2023); https://doi.org/10.1117/12.2661314
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KEYWORDS
Plasmonics
Zinc oxide
Atomic layer deposition
Infrared spectroscopy
Spectroscopic ellipsometry
Thin films
Transparent conductors
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