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13 March 2024 NbN superconducting nanowire single-photon detectors integrated on Si-based waveguide using CMOS-compatible processing on 200 mm wafers
Valentin Brisson, Joël Bleuse, Raouia Rhazi, Jonathan Faugier-Tovar, Jean-Michel Gérard, Olivier Ségolène
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Proceedings Volume PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII; PC1288902 (2024) https://doi.org/10.1117/12.3000377
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
There is an increasing demand for superconducting nanowire single photon detectors (SNSPDs) which combine high efficiency, low dark counts and fast response time. They play a crucial role in developing strategic application areas such as photon-based quantum computing and quantum key distribution. We demonstrate the fabrication of high crystalline quality NbN-based waveguide-integrated SNSPDs using a completely CMOS-compatible process on 200 mm SOI wafers. We achieve a detection efficiency over 80 % at 100 Hz dark count rate, a short decay time below 4 ns and a maximum count rate of 200 MHz.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Valentin Brisson, Joël Bleuse, Raouia Rhazi, Jonathan Faugier-Tovar, Jean-Michel Gérard, and Olivier Ségolène "NbN superconducting nanowire single-photon detectors integrated on Si-based waveguide using CMOS-compatible processing on 200 mm wafers", Proc. SPIE PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, PC1288902 (13 March 2024); https://doi.org/10.1117/12.3000377
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KEYWORDS
Nanowires
Semiconducting wafers
Single photon detectors
Superconductors
Waveguides
Quantum processing
Quantum detection
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