Characterization of commercial dyes for PMMA bilayer systems

Patrick J. Paniez; Gilles R. Amblard; Elisabeth C. Dechenaux; Andre P. Weill

doi:10.1117/12.975610

17 September 1987 Characterization of commercial dyes for PMMA bilayer systems

Patrick J. Paniez, Gilles R. Amblard, Elisabeth C. Dechenaux, Andre P. Weill

Proceedings Volume 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection; (1987) https://doi.org/10.1117/12.975610
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

The absorption properties of the well-known coumarin dyes are evaluated at the 436 nm g line for PMMA bilayer systems. Their properties are compared with those of other commercial products. The main requirements to be met are : good solubility in PMMA solutions, an absorption spectrum adapted to bilayer processes and thermal stability. Several azo dyes have been selected from among a large number of compounds and are proposed as an advantageous alternative to coumarin dyes. The implementation of one of these selected dyes in a bilayer process is given as an example. A good dimensional control is obtained for 1 μm lines over critical topographies.

Citation Download Citation

Patrick J. Paniez, Gilles R. Amblard, Elisabeth C. Dechenaux, and Andre P. Weill "Characterization of commercial dyes for PMMA bilayer systems", Proc. SPIE 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (17 September 1987); https://doi.org/10.1117/12.975610

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