PROCEEDINGS VOLUME 0811
FOURTH INTERNATIONAL SYMPOSIUM ON OPTICAL AND OPTOELECTRONIC APPLIED SCIENCES AND ENGINEERING | 30 MARCH - 3 APRIL 1987
Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection
Editor(s): Harry L. Stover, Stefan Wittekoek
Editor Affiliations +
IN THIS VOLUME

1 Sessions, 25 Papers, 0 Presentations, 0 Posters
All Papers  (25)
FOURTH INTERNATIONAL SYMPOSIUM ON OPTICAL AND OPTOELECTRONIC APPLIED SCIENCES AND ENGINEERING
30 March - 3 April 1987
The Hague, Netherlands
All Papers
S. Radelaar
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975590
Joop Andrea
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975591
Mung Chen
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975592
Joseph Braat
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975593
L. Sebastian, N. Lehner, F. Bieringer, W. Arden
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975594
D. M. Gale, M. I. Pether, F. C. Reavell
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975595
Walter G. Hertlein
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975596
B. Roland, R. Lombaerts, C. Jakus, F. Coopmans
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975597
Robert-Jan Visser, Jack P. W. Schellekens, Marian E. Reuhman-Huisken
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975598
F. Debaene, J. M. Dumant, B. Latombe
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975599
J. Etrillard
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975600
G. Wijbenga, M. S. Chen, S. A. Fine
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975601
A. Czitrovszky, P. Jani, P. Juhasz, A. Vertes
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975602
Mitsuo Yabuta, Naoki Ito, Hiroyuki Yamazaki, Toshimasa Nakayama
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975603
F. J. van Hout, M. A. van den Brink, S. Wittekoek
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975604
Michele Nuhn, Shi-Kay Yao, Brad Avrit
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975605
Adonis C. Stephanakis, Daniel I. Rubin, Ron Voisin
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975606
Herbert E. Mayer, Ernst W. Loebach
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975607
Andre P. Weill, Elisabeth C. Dechenaux, Patrick J. Paniez, Gilles R. Amblard
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975608
R. Sezi, R. Leuschner, c. Nolscher, D. Stephani
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975609
Patrick J. Paniez, Gilles R. Amblard, Elisabeth C. Dechenaux, Andre P. Weill
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975610
Wells C. Cunningham Jr., Janet C. McFarland, Chan-Eon Park
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975611
J. Ch. Guibert, M. Chevallier
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975612
M. Ribes, B. Cros, P. Julien
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975613
Peter C. Sukanek, Glynis Sullivan
Proceedings Volume Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (1987) https://doi.org/10.1117/12.975614
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