Fabrication of 2D and 3D photonic structures using laser lithography

P. Gaso; D. Jandura; D. Pudis

doi:10.1117/12.2264450

23 December 2016 Fabrication of 2D and 3D photonic structures using laser lithography

P. Gaso, D. Jandura, D. Pudis

Proceedings Volume 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 101421F (2016) https://doi.org/10.1117/12.2264450
Event: 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2016, Jasna, Slovakia

Abstract

In this paper we demonstrate possibilities of three-dimensional (3D) printing technology based on two photon polymerization. We used three-dimensional dip-in direct-laser-writing (DLW) optical lithography to fabricate 2D and 3D optical structures for optoelectronics and for optical sensing applications. DLW lithography allows us use a non conventional way how to couple light into the waveguide structure. We prepared ring resonator and we investigated its transmission spectral characteristic. We present 3D inverse opal structure from its design to printing and scanning electron microscope (SEM) imaging. Finally, SEM images of some prepared photonic crystal structures were performed.

Citation Download Citation

P. Gaso, D. Jandura, and D. Pudis "Fabrication of 2D and 3D photonic structures using laser lithography", Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 101421F (23 December 2016); https://doi.org/10.1117/12.2264450

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