Development of atmospheric pressure plasma torch for the fabrication of freeform optics

Xing Su; Qiang Xin; Yuanhang Liu; Longguang Xia; Bo Wang

doi:10.1117/12.2267633

8 March 2017 Development of atmospheric pressure plasma torch for the fabrication of freeform optics

Xing Su, Qiang Xin, Yuanhang Liu, Longguang Xia, Bo Wang

Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102550P (2017) https://doi.org/10.1117/12.2267633
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China

Abstract

Freeform optics especially Continues Phase Plate, are greatly demanded in high power laser systems. Fabrication of them with high efficiency and low sub-surface damage becomes a major challenge. Atmospheric pressure plasma processing using radicals produced by plasma torch, which has strong potential for machining freeform optics with millimeter and sub-millimeter spatial resolution, is proposed. This paper presents a novel plasma torch designed for fabricating freeform optics. This integral compact torch is comprised of needle electrode and micro-hole electrode. Millimeter-scale plasma jet of different size can be obtained by changing the micro-hole electrode. To analyze the process distribution of process gas of the jet flow, flow simulation is performed using COMSOL Multiphysics software. A set of single factor experiments are conducted to reveal the relationship between removal characteristics and flow rate of He, CF₄ and O₂. The removal rate with adding O₂ increases 7 times of that without O₂, and the spectrum change of the plasma jet is observed. It indicates that O₂ improves removal rate through consuming existing CF_x to produce more F radicals. The removal rate and full width at half maximum (FWHM) of typical removal function is about 19 μm/min-2.2 mm and 18 μm/min-1.1 mm respectively.

Citation Download Citation

Xing Su, Qiang Xin, Yuanhang Liu, Longguang Xia, and Bo Wang "Development of atmospheric pressure plasma torch for the fabrication of freeform optics", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102550P (8 March 2017); https://doi.org/10.1117/12.2267633

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KEYWORDS

Plasma

Atmospheric plasma

Electrodes

Freeform optics

Atmospheric optics

Spatial resolution

Plasma generation

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