Asymmetric metal-insulator-metal (MIM) structure formed by pulsed Nd:YAG laser deposition with titanium nitride (TiN) and aluminum nitride (AlN)

Yasushi Oshikane

doi:10.1117/12.2273483

30 August 2017 Asymmetric metal-insulator-metal (MIM) structure formed by pulsed Nd:YAG laser deposition with titanium nitride (TiN) and aluminum nitride (AlN)

Yasushi Oshikane

Author Affiliations +

Proceedings Volume 10356, Nanostructured Thin Films X; 103560B (2017) https://doi.org/10.1117/12.2273483
Event: SPIE Nanoscience + Engineering, 2017, San Diego, California, United States

Abstract

A novel nanostructured end cap for a truncated conical apex of optical fiber has been studied experimental and numerically. The peculiar cap is composed of asymmetric metal-insulator-metal (MIM) structure coupled with subwavelength holes. The MIM structure may act as reflective band cut filter or generator of surface plasmon polariton (SPP). And nano holes in the thicker metal layer could extract the SPP from the MIM structure and lead it to outer surface of the metal layer. For the purpose, the author has started to create the asymmetric MIM structure with TiN and AlN by pulsed laser deposition (PLD). The resultant structure was diagnosed by spectroscopic analyses.

Citation Download Citation

Yasushi Oshikane "Asymmetric metal-insulator-metal (MIM) structure formed by pulsed Nd:YAG laser deposition with titanium nitride (TiN) and aluminum nitride (AlN)", Proc. SPIE 10356, Nanostructured Thin Films X, 103560B (30 August 2017); https://doi.org/10.1117/12.2273483

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