Optical waveguides for 1064 nm and chip pigtailing with PM fibers

Pekka Katila; Timo Aalto; Päivi Heimala; Matti Leppihalme

doi:10.1117/12.2307909

21 November 2017 Optical waveguides for 1064 nm and chip pigtailing with PM fibers

Pekka Katila, Timo Aalto, Päivi Heimala, Matti Leppihalme

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Proceedings Volume 10569, International Conference on Space Optics — ICSO 2000; 1056920 (2017) https://doi.org/10.1117/12.2307909
Event: International Conference on Space Optics 2000, 2000, Toulouse Labège, France

Abstract

The purpose of this project was to develop optical waveguide technology to offer polarization maintaining (PM) components for a Nd:YAG laser wavelength at 1.064 μm. The silicon oxynitride waveguide layers were grown with a PECVD method on a silicon wafer. The waveguide height and width are 3.5 μm and 6.0 μm, respectively. A well balanced 3 dB operation was achieved with a 2´2 MMI coupler. The excess loss of the coupler was 2 dB. The polarization maintaining properties were studied by measuring the polarization extinction coefficient (PXR) of the straight waveguides and pigtailed chips. Typical PXR for a 15 mm waveguide was <18 dB. Waveguide crossings at different crossing angles were characterized in terms of excess loss and PXR. Both passive and active fiber alignment was studied to achieve low-loss pigtailing with a polarization maintaining fiber.

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Pekka Katila, Timo Aalto, Päivi Heimala, and Matti Leppihalme "Optical waveguides for 1064 nm and chip pigtailing with PM fibers", Proc. SPIE 10569, International Conference on Space Optics — ICSO 2000, 1056920 (21 November 2017); https://doi.org/10.1117/12.2307909

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KEYWORDS

Waveguides

Optical fibers

Silicon

Brain-machine interfaces

Etching

Phase modulation

Polarization

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