Advances of MOEMS-based external cavity QCLs

M. Haertelt; S. Hugger; L. Butschek; C. Schilling; A. Merten; M. Schwarzenberg; A. Dreyhaupt; J. Grahmann; M. Rattunde; R. Ostendorf

doi:10.1117/12.2509819

11 February 2019 Advances of MOEMS-based external cavity QCLs

M. Haertelt, S. Hugger, L. Butschek, C. Schilling, A. Merten, M. Schwarzenberg, A. Dreyhaupt, J. Grahmann, M. Rattunde, R. Ostendorf

Author Affiliations +

Proceedings Volume 10926, Quantum Sensing and Nano Electronics and Photonics XVI; 1092613 (2019) https://doi.org/10.1117/12.2509819
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

The combination of broadly tunable quantum cascade laser chips in an external cavity (EC-QCL) with a micro- electromechanical system (MEMS) scanner with integrated diffraction grating as wavelength-selective element allows for the development of extremely compact and robust spectroscopy systems. Resonant MOEMS grating scanners enable spectral tuning rates of hundreds of wavenumbers per millisecond and consequently broad-band spectroscopy with millisecond temporal resolution. Also non-resonant (quasi-static) MOEMS grating scanners are possible, providing scan rates of tens of Hz as well as static setting of arbitrary wavelengths, as common for mechanically driven EC lasers, while keeping the small MOEMS footprint, ruggedness, and low power consumption. Here, we give a progress report on the latest developments on MOEMS-based EC-QCLs made by Fraunhofer IAF and IPMS. We will highlight two of our latest developments: A non-resonant MOEMS EC-QCL version that allows arbitrary scan frequencies up to few ten Hertz, as well as static operation. Furthermore, we present the application of a resonantly driven cw-MOEMS-EC-QCL with cavity-length control to enable fast high-resolution spectroscopy over a spectral range of >100 cm^-1, offering new possibilities for spectroscopy on complex gas mixtures.

Citation Download Citation

M. Haertelt, S. Hugger, L. Butschek, C. Schilling, A. Merten, M. Schwarzenberg, A. Dreyhaupt, J. Grahmann, M. Rattunde, and R. Ostendorf "Advances of MOEMS-based external cavity QCLs", Proc. SPIE 10926, Quantum Sensing and Nano Electronics and Photonics XVI, 1092613 (11 February 2019); https://doi.org/10.1117/12.2509819

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available