Radiometric Quality Ge Photodiodes

Dragan Grubisic; Theodore T. S. Wong

doi:10.1117/12.960728

26 September 1989 Radiometric Quality Ge Photodiodes

Dragan Grubisic, Theodore T. S. Wong

Proceedings Volume 1109, Optical Radiation Measurements II; (1989) https://doi.org/10.1117/12.960728
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

Recent advances in detector fabrication and passivation technology have led to the realization of high performance germanium photodiodes with improved reliability suitable for use in optical radiometric measurement applications. Among the most significant accomplishments are the development of planar devices via ion implantation; the effective use of activation anneal and damage removal schemes; and the successfull application of plasma enhanced chemical deposition of oxynitride films in surface passivation. Several key parameters are used to measure the enhancement of the radiometric quality of the device. These include spectral external and internal quantum efficiency, long term stability of the responsivity and the dark current, and spatial uniformity across the active area. Finally, experimental results are compared with theoretical calculations leading to recommendations for further optimization of germanium photodiode performance.

Citation Download Citation

Dragan Grubisic and Theodore T. S. Wong "Radiometric Quality Ge Photodiodes", Proc. SPIE 1109, Optical Radiation Measurements II, (26 September 1989); https://doi.org/10.1117/12.960728

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