Design And Fabrication Of A Self-Calibrating Germanium Photodiode

R. J. Schwartz; D. L. Huang

doi:10.1117/12.971067

8 February 1985 Design And Fabrication Of A Self-Calibrating Germanium Photodiode

R. J. Schwartz, D. L. Huang

Proceedings Volume 0499, Optical Radiation Measurements; (1985) https://doi.org/10.1117/12.971067
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

The design of a self-calibrating germanium photo-diode with an internal quantum efficiency in excess of 980 in the wavelength range from .4 to 1.5 μm is described. The fabrication of these photodiodes by ion implantation is discussed.

Citation Download Citation

R. J. Schwartz and D. L. Huang "Design And Fabrication Of A Self-Calibrating Germanium Photodiode", Proc. SPIE 0499, Optical Radiation Measurements, (8 February 1985); https://doi.org/10.1117/12.971067

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