A comparative study on reflection of broadband EUV multilayer mirrors basing on Levenberg-Marquardt algorithm

Zhining Lin; Shujing Chen; Chengyou Lin

doi:10.1117/12.2540284

18 December 2019 A comparative study on reflection of broadband EUV multilayer mirrors basing on Levenberg-Marquardt algorithm

Zhining Lin, Shujing Chen, Chengyou Lin

Author Affiliations +

Proceedings Volume 11336, AOPC 2019: Nanophotonics; 1133603 (2019) https://doi.org/10.1117/12.2540284
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

In this paper, a local optimization algorithm (Levenberg-Marquardt algorithm) is employed for broadband EUV multilayer design. A merit function is optimized in the Levenberg-Marquardt algorithm, for achieving maximum reflectivity of the designed broadband EUV multilayer mirrors. Using this algorithm, the reflectivity of broadband EUV multilayer mirrors with different broadband for various central photon energy are designed and compared. Under the condition of normal incidence, the maximum average reflectivity of designed broadband EUV multilayer mirrors with 20 eV bandwidth for 40 eV, 60 eV and 80 eV central photon energy are 6%, 16% and 21% respectively, while the ones with 10 eV, 20 eV and 30 eV bandwidth for 80 eV central photon energy are 29%, 21% and 15% respectively. In addition, the effect of incident angle on the reflectivity of broadband EUV multilayer mirrors is also studied. It is found that the maximum average reflectivity of designed broadband EUV multilayer mirror with 20 eV bandwidth for 80 eV central photon energy increases from 21% to 53%, when the incident angle of light increases from 0° to 60°. We believe this research is important because it provides a guide for the design of broadband EUV multilayer mirrors with high reflectivity.

Citation Download Citation

Zhining Lin, Shujing Chen, and Chengyou Lin "A comparative study on reflection of broadband EUV multilayer mirrors basing on Levenberg-Marquardt algorithm", Proc. SPIE 11336, AOPC 2019: Nanophotonics, 1133603 (18 December 2019); https://doi.org/10.1117/12.2540284

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available