Innovative methods for optimization and characterization of multilayer coatings

M. G. Pelizzo; M. Suman; G. Monaco; D. L. Windt; P. Nicolosi

doi:10.1117/12.820793

30 April 2009 Innovative methods for optimization and characterization of multilayer coatings

M. G. Pelizzo, M. Suman, G. Monaco, D. L. Windt, P. Nicolosi

Proceedings Volume 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space; 73600Q (2009) https://doi.org/10.1117/12.820793
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

A numerical method to design multilayer coating (ML) is presented. The mathematical tool is based on an "evolutive strategy" algorithm which provides aperiodic solutions by maximizing input merit functions. It allows the optimization of any kind of structures, comprising interlayers and capping layers, and modelling also inter-diffusion and interface roughness. It has been applied to the design of MLs for different applications, as photolithography, space instrumentation and short pulse preservation/compression. The optimization allows the control of the standing wave distribution inside the ML. When the EUV radiation interacts with the structure, the superposition of the incident and reflected electromagnetic wave generates a standing wave field distribution in the ML. An aperiodic design allows the regulation of the distribution of this field, attributing specific properties to the ML. An experimental technique to recover standing wave intensity on top of the ML is also cited. The technique is based on electron photoemission measurements, which allow to determine both reflectivity as well as phase on top of ML. Thanks to this technique, both tests of the ML performances compliance with expected theoretical ones and of degradation through time can be carried on.

Citation Download Citation

M. G. Pelizzo, M. Suman, G. Monaco, D. L. Windt, and P. Nicolosi "Innovative methods for optimization and characterization of multilayer coatings", Proc. SPIE 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, 73600Q (30 April 2009); https://doi.org/10.1117/12.820793

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