Fabrication Of Deep Bragg Gratings For DFB Lasers And Waveguide Filters By Wet And Dry Etching Processes In InGaAsP

H. Unzeitig; C. Cremer; G Heise

doi:10.1117/12.961902

6 December 1989 Fabrication Of Deep Bragg Gratings For DFB Lasers And Waveguide Filters By Wet And Dry Etching Processes In InGaAsP

H. Unzeitig, C. Cremer, G Heise

Author Affiliations +

Proceedings Volume 1141, 5th European Conf on Integrated Optics: ECIO '89; (1989) https://doi.org/10.1117/12.961902
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Mask generation, etching process and cha-racterization of first-order deep Bragg grating corrugations on InP and InGaAsP compound material is presented. DFB lasers with a side-mode suppression of more than 30 dB were obtained. In addition nine different monolithic grating filters on rib waveguides proved to be valuable for narrow-band wavelength division multiplexing (WDM) applications.

Citation Download Citation

H. Unzeitig, C. Cremer, and G Heise "Fabrication Of Deep Bragg Gratings For DFB Lasers And Waveguide Filters By Wet And Dry Etching Processes In InGaAsP", Proc. SPIE 1141, 5th European Conf on Integrated Optics: ECIO '89, (6 December 1989); https://doi.org/10.1117/12.961902

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