Paper
5 March 2021 Ultrafast nanoscale XUV table-top coherent diffractive imaging
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Abstract
In recent years coherent diffraction imaging (CDI) has evolved into a mature technology. Thanks to its lensless nature, it allowed to bypass the limitations of X-ray optics. At the same time, laser development in combination with high harmonic generation (HHG) has pushed the coherent XUV photon flux to values comparable to 3rd generation synchrotron facilities, which enables lensless imaging experiments that were previously only possible at large-scale facilities. Furthermore, the intrinsic short pulse duration of HHG radiation has potential for imaging experiments down to attosecond time scales. In this contribution, we present our latest results on lensless imaging using a fiber laser driven HHG source at 92 eV. A high photon flux source is used for scanning coherent diffractive imaging (ptychography) demonstrating sub-50 nm resolution. Further, an extension to Fourier transform holography is shown, which enables to increase the useable bandwidth by a factor of five without sacrificing spatial resolution. This paves the way for combing high-resolution table-top lensless imaging with attosecond pump-probe experiments.
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wilhelm Eschen, Vittoria Schuster, Sici Wang, Lars Loetgering, Chang Liu, Robert Klas, Jens Limpert, and Jan Rothhardt "Ultrafast nanoscale XUV table-top coherent diffractive imaging", Proc. SPIE 11676, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXI, 116761B (5 March 2021); https://doi.org/10.1117/12.2578527
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KEYWORDS
Coherence imaging

Extreme ultraviolet

Ultrafast imaging

Lithography

Photomasks

Spatial resolution

Synchrotrons

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