Sici Wang
at Friedrich-Schiller-Univ Jena
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 March 2021 Paper
Proceedings Volume 11676, 116761B (2021) https://doi.org/10.1117/12.2578527
KEYWORDS: Coherence imaging, Extreme ultraviolet, Ultrafast imaging, Synchrotrons, Spatial resolution, Photomasks, Lithography, Temporal resolution, Temporal coherence, Metrology

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