Silicon planar refractive optics for coherent x-ray sources: metrology and manufacturing approaches

M. Sorokovikov; D. Zverev; V. Yunkin; S. Kuznetsov; I. Snigireva; A. Snigirev

doi:10.1117/12.2594815

21 September 2021 Silicon planar refractive optics for coherent x-ray sources: metrology and manufacturing approaches

M. Sorokovikov, D. Zverev, V. Yunkin, S. Kuznetsov, I. Snigireva, A. Snigirev

Proceedings Volume 11837, Advances in X-Ray/EUV Optics and Components XVI; 1183704 (2021) https://doi.org/10.1117/12.2594815
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

The X-ray planar compound refractive lenses (CRLs) made of monocrystalline silicon by a lithography and plasma deep Si etching (Bosch process) were considered. The CRL is a planar structure of biconcave parabolic refractive surfaces etched into silicon wafers down to 70 μm. The geometrical parameters of the parabolic lens structures were measured by different SEM-based methods and compared with CAD data. The influence of the manufacturing errors on the CRLs optical properties was discussed. The approaches for the improvement of the lens manufacturing techniques were proposed.

Citation Download Citation

M. Sorokovikov, D. Zverev, V. Yunkin, S. Kuznetsov, I. Snigireva, and A. Snigirev "Silicon planar refractive optics for coherent x-ray sources: metrology and manufacturing approaches", Proc. SPIE 11837, Advances in X-Ray/EUV Optics and Components XVI, 1183704 (21 September 2021); https://doi.org/10.1117/12.2594815

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