Nano-diffractive elements in BSI pixel CMOS image sensors: optical design and process integration co-optimization with pixel scaling

M. Barlas; A. Crocherie; F. Bardonnet; Q. Abadie; E. Sungauer; M. Vignetti; B. Mamdy; I. Nicholson; P. G. D'Aillon; A. R. Bianchi; G. Mugny; D. Golanski; F. Domengie; P. Besson; E. Prevost; L. Parmigiani; J. Arnaud; H. Wehbe-Alause; A. Tournier; O. Noblanc; K. Rochereau

doi:10.1117/12.2609360

5 March 2022 Nano-diffractive elements in BSI pixel CMOS image sensors: optical design and process integration co-optimization with pixel scaling

M. Barlas, A. Crocherie, F. Bardonnet, Q. Abadie, E. Sungauer, M. Vignetti, B. Mamdy, I. Nicholson, P. G. D'Aillon, A. R. Bianchi, G. Mugny, D. Golanski, F. Domengie , P. Besson, E. Prevost, L. Parmigiani, J. Arnaud, H. Wehbe-Alause, A. Tournier, O. Noblanc, K. Rochereau

Author Affiliations +

Proceedings Volume 12004, Integrated Optics: Devices, Materials, and Technologies XXVI; 120040V (2022) https://doi.org/10.1117/12.2609360
Event: SPIE OPTO, 2022, San Francisco, California, United States

Conference Poster

Abstract

Next-generation BSI CMOS Imager Sensors are strongly driven by novel applications in depth sensing, mainly operating in the NIR (940nm) spectrum. As a result, the need for higher pixel sensitivity while shrinking pixel pitch is more present than ever. In this work, we present a new technology platform based on ad-hoc nano diffractor geometries, integrated in the Back Side of BSI CIS that allow to drastically improve the QE of the sensor for pitches varying from 10 μm down to 2.2 μm, co-optimized for both optical and electronic pixel performance.

Conference Presentation

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M. Barlas, A. Crocherie, F. Bardonnet, Q. Abadie, E. Sungauer, M. Vignetti, B. Mamdy, I. Nicholson, P. G. D'Aillon, A. R. Bianchi, G. Mugny, D. Golanski, F. Domengie , P. Besson, E. Prevost, L. Parmigiani, J. Arnaud, H. Wehbe-Alause, A. Tournier, O. Noblanc, and K. Rochereau "Nano-diffractive elements in BSI pixel CMOS image sensors: optical design and process integration co-optimization with pixel scaling", Proc. SPIE 12004, Integrated Optics: Devices, Materials, and Technologies XXVI, 120040V (5 March 2022); https://doi.org/10.1117/12.2609360

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