Paper
27 March 2022 Common-path and synchronous phase shifting of lateral shearing interferometry based on micro-polarizer array
Yahui Zhu, Ailing Tian, Bingcai Liu Sr., Hongjun Wang Sr., Kai Wang, Siqi Wang
Author Affiliations +
Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121694A (2022) https://doi.org/10.1117/12.2624043
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China
Abstract
Based on birefringence theory and polarization-synchronized phase-shifting lateral shearing interferometry technology, we proposed a compact and simple polarization phase-shifting lateral shearing interferometer using a polarization camera integrated with a phase-shifting array of micro-polarizers. This interferometer is designed to realize a common optical path synchronous phase-shifting lateral shearing interference for aspheric surface testing system. This interferometer is composed of a polarization beam displacer (PBD), a quarter-wave plate (QWP), polarization camera (PCam). With the polarization birefringent crystal used as the PBD to realize the lateral shearing, and the parallel beam is divided into linearly polarized light whose polarization directions are orthogonal to each other. With the QWP changed the shear beam formed by the interference of the measuring beam and the self-copy beam into circularly polarized light with the opposite rotation direction. Next, with the micro-polarizer phase-shifting array on the PCam obtained four shearing interferograms with a phase-shifting difference is π/2, which allows for the implement of aplanatic and common optical path shearing interferometer. Therefore, the system possesses significant advantages of simple structure, compact and strong antiinterference ability. Then, by the four-step phase-shifting algorithm demodulated the measurement light field distribution on the shearing interferograms. Finally, using the Zernike polynomial fitting method realized the surface shape reconstruction of the interferogram wavefront. The effectiveness of the interferometer is demonstrated by simulations and experiments, which research results showed that the optical measurement method can extract interferogram information in real time and directly measure the wavefront phase distribution.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yahui Zhu, Ailing Tian, Bingcai Liu Sr., Hongjun Wang Sr., Kai Wang, and Siqi Wang "Common-path and synchronous phase shifting of lateral shearing interferometry based on micro-polarizer array", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121694A (27 March 2022); https://doi.org/10.1117/12.2624043
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Phase shifts

Polarization

Interferometry

Optical testing

Optical components

Wavefronts

Aspheric lenses

Back to Top