Effect of magneto rheological polishing of ZnGeP2 on surface roughness

N. N. Yudin; A. L. Khudolei; M. M. Zinovev; A. S. Olshukov; A. Yu. Davydova

doi:10.1117/12.2644974

7 December 2022 Effect of magneto rheological polishing of ZnGeP₂ on surface roughness

N. N. Yudin, A. L. Khudolei, M. M. Zinovev, A. S. Olshukov, A. Yu. Davydova

Proceedings Volume 12341, 28th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics; 123413M (2022) https://doi.org/10.1117/12.2644974
Event: 28th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics, 2022, Tomsk, Russia

Abstract

The paper shows the effect of magneto-rheological (MPO) polishing of a ZnGeP₂ on the surface roughness. The extreme level of surface roughness of the ZnGeP₂ Ra=1.54Å was recorded. Analysis of the topography of the sample surface before and after magnetic polishing showed that after the classical polishing technology, the relief of the surfaces was formed under the influence of multidirectional movement of the working tool, there are single extended scratches up to 1.3 nm deep. The topography of the sample surface after MPO polishing does not contain these scratches and is represented by a less textured profile formed under the influence of MPO fluid.

Citation Download Citation

N. N. Yudin, A. L. Khudolei, M. M. Zinovev, A. S. Olshukov, and A. Yu. Davydova "Effect of magneto rheological polishing of ZnGeP₂ on surface roughness", Proc. SPIE 12341, 28th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics, 123413M (7 December 2022); https://doi.org/10.1117/12.2644974

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