MOEMS Fabry-Pérot interferometers with ALD TiO2 anti-stiction coating for pull-in failure prevention

Sari Elomaa; Altti Akujärvi; Heikki Saari

doi:10.1117/12.2645851

17 March 2023 MOEMS Fabry-Pérot interferometers with ALD TiO₂ anti-stiction coating for pull-in failure prevention

Sari Elomaa, Altti Akujärvi, Heikki Saari

Proceedings Volume 12425, Smart Photonic and Optoelectronic Integrated Circuits 2023; 124250G (2023) https://doi.org/10.1117/12.2645851
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

In metallic mirror Micro-opto-electro-mechanical system (MOEMS) Fabry Pérot interferometer (FPI) chips, sticking and non-reversible pull-in of the two mirrors is lowering the lifetime of the component. Adding 10 nm of atomic layer deposited (ALD) of semiconducting titanium dioxide (TiO₂) coating over the cavity of the mirror decreased the static charge inside the mirror cavity preventing sticking of the mirrors and the mirrors survived actuated to pull-in for more than 1000 times. As too thick layers can optically lower the performance of the mirror and overly thin layers would not decrease the static charge, we studied three different TiO₂ thicknesses of 3 nm, 5 nm, and 10 nm. In conclusion, 10 nm TiO₂ layer does not optically interfere in the FPI´s performance and it has the best conductivity of all tested TiO2 film thicknesses.

Conference Presentation

Citation Download Citation

Sari Elomaa, Altti Akujärvi, and Heikki Saari "MOEMS Fabry-Pérot interferometers with ALD TiO₂ anti-stiction coating for pull-in failure prevention", Proc. SPIE 12425, Smart Photonic and Optoelectronic Integrated Circuits 2023, 124250G (17 March 2023); https://doi.org/10.1117/12.2645851

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