Ms. Sari Elomaa Profile

Sari Elomaa

at VTT - Technical Research Center of Finland

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Publications (1)

Proceedings Article | 17 March 2023 Presentation + Paper

MOEMS Fabry-Pérot interferometers with ALD TiO2 anti-stiction coating for pull-in failure prevention

Sari Elomaa, Altti Akujärvi, Heikki Saari

Proceedings Volume 12425, 124250G (2023) https://doi.org/10.1117/12.2645851

KEYWORDS: Mirrors, Atomic layer deposition, Silver, Titanium dioxide, Coating, Semiconducting wafers, Microelectromechanical systems, Aluminum, Imaging systems, Wafer-level optics

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