CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 12439 > Article
Presentation + Paper
15 March 2023 High efficiency 10-micron-pitch 64x64 addressable VCSEL array with intracavity structure
H. Watanabe, T. Matou, S. Yamaguchi, K. Tokuda, Y. Hanzawa, N. Kikuchi, M. Oishi, S. Nagane, Y. Otoguro, Y. Nakayama, K. Sato, R. Koda, N. Fuutagawa
Author Affiliations +
Proceedings Volume 12439, Vertical-Cavity Surface-Emitting Lasers XXVII; 1243903 (2023) https://doi.org/10.1117/12.2648810
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
In this paper, we report a high efficiency, addressable 940 nm Vertical-Cavity Surface-Emitting Laser (VCSEL) array with a tight pitch of 10 m for a compact, low-power sensing light source. High electrical resistance of a small diameter semiconductor DBR is a major issue to obtain a high-power conversion efficiency in achieving a tight pitch VCSEL array. We have developed a highly efficient back side emitted VCSEL with intracavity contacted structure, mesa diameter of 7.5 μm, and optical aperture of 3.0 μm. The power conversion efficiency exceeded 30% from 0.5 mW to 3.5 mW in the wide power range. We also report Tx module using this highly efficient VCSEL with a tight pitch of 10 μm. The tight pitch addressable 2D VCSEL array required sophisticated process techniques because they have a small spacing of 2–3 μm between mesas. To improve productivity, we developed a new device structure decreasing the process difficulty between mesas and demonstrated 2D addressable VCSEL array arranged 64 by 64 matrix and 4096 emitters. In addition, we demonstrated addressable operation with assembled sample using Si interposer.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
H. Watanabe, T. Matou, S. Yamaguchi, K. Tokuda, Y. Hanzawa, N. Kikuchi, M. Oishi, S. Nagane, Y. Otoguro, Y. Nakayama, K. Sato, R. Koda, and N. Fuutagawa "High efficiency 10-micron-pitch 64x64 addressable VCSEL array with intracavity structure", Proc. SPIE 12439, Vertical-Cavity Surface-Emitting Lasers XXVII, 1243903 (15 March 2023); https://doi.org/10.1117/12.2648810
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 5 PAGES + PRESENTATION
DOWNLOAD PAPER SAVE TO MY LIBRARY
WATCH
PRESENTATION
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Vertical cavity surface emitting lasers
LIDAR
Gallium arsenide
Light sources
Oxides
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top